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Metal HeaterBUSINESS

Metal Heater

1. Heater Block

DESCRIPTION P/N SIZE PROCESS
Heater Block 150mm 19-00155-01
19-032015-01
ETC
6" PE-OXIDE
PE-TEOS
Nitride
Oxide
PE-CVD
Heater Block 200mm 19-00154-00
19-024227-01
ETC
8"

2. L/L Pre-Heater

DESCRIPTION P/N SIZE PROCESS
VECTOR Pre-heater
(Oring Type)
02-146672-00 12" PE-CVD
VECTOR Pre-heater
(New Type)
02-265257-00 12"

3. ALTUS Pedestal

DESCRIPTION P/N SIZE PROCESS
ALTUS
Pedestal 300mm
02-292391-00
16-377679-00
ETC
12" Metal-CVD-Q
Cu
ALTUS
Pedestal 200mm
02-033395-01
02-033134-01
ETC
8"

4. VECTOR Pedestal Thin

DESCRIPTION P/N SIZE PROCESS
VECTOR Process Pedestal
Thin 300mm
02-364187-00
02-373416-00
12" PE-CVD
  • INFORMATION
  • BOBOO Hitech Co., Ltd
  • 251, Daeji-ro, Suji-gu, Yongin-si, Gyeonggi-do, Republic of Korea
  • +82-31-763-3200
  • +82-31-763-3200
  • (FAX) : +82-31-763-5400
  • WEB MASTER
  • e-mail : boboohi@boboohitech.co.kr
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