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ESCBUSINESS

ESC(Electro Static Chuck) Repair

LAM #374 / #608 / #611 ESC 300mm

P/N TYPE PROCESS
839-019090-374
839-019090-608A
839-019090-611B
Al2O3 Etch

LAM #315 / #324 / #328 / #385 / #412 / #432 / #438 ESC 300mm

P/N TYPE PROCESS
839-800327-315
839-019090-324
839-019090-328
839-800327-385
389-800327-412
389-800327-432
839-800327-438
Al2O3
Johnsen - Rahbek
Etch

AMAT Producer / E-Max / Enabler ESC 300mm

P/N TYPE PROCESS
0010-24774
0010-16392
0010-27784
AlN
Johnsen - Rahbek
Etch

LAM #508 ESC 200mm

P/N TYPE PROCESS
839-440562-508 Al2O3
Johnsen - Rahbek
Etch

ESC Repair Procedure


  • INFORMATION
  • BOBOO Hitech Co., Ltd
  • 251, Daeji-ro, Suji-gu, Yongin-si, Gyeonggi-do, Republic of Korea
  • +82-31-763-3200
  • +82-31-763-3200
  • (FAX) : +82-31-763-5400
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  • e-mail : boboohi@boboohitech.co.kr
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